Semiconductor Lithography

Semiconductor Lithography

EnglishPaperback / softbackPrint on demand
Moreau Wayne M.
Springer-Verlag New York Inc.
EAN: 9781461282280
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EAN 9781461282280
ISBN 1461282284
Binding Paperback / softback
Publisher Springer-Verlag New York Inc.
Publication date February 22, 2012
Pages 952
Language English
Dimensions 244 x 170
Country United States
Readership Professional & Scholarly
Authors Moreau Wayne M.
Illustrations 952 p.
Edition Softcover reprint of the original 1st ed. 1988
Series Microdevices
Manufacturer information
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